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3D nonlinear modeling of microhotplates in CMOS technology for use as metal-oxide-based gas sensors

✍ Scribed by Graf, M; Jurischka, R; Barrettino, D; Hierlemann, A


Book ID
120060282
Publisher
Institute of Physics
Year
2004
Tongue
English
Weight
423 KB
Volume
15
Category
Article
ISSN
0960-1317

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