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Citric Acid Etching of GaAs[sub 1−x]Sb[sub x], Al[sub 0.5]Ga[sub 0.5]Sb, and InAs for Heterostructure Device Fabrication

✍ Scribed by DeSalvo, Gregory C.

Book ID: 118134790
Publisher: The Electrochemical Society
Year: 1994
Tongue: English
Weight: 621 KB
Volume: 141
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2059365

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