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Chromium thin film deposition on ITO substrate by RF sputtering

✍ Scribed by Akbarnejad, Elaheh; Soleimani, Ebrahim Asl; Ghorannevis, Zohreh

Book ID
125386351
Publisher
Springer-Verlag
Year
2014
Tongue
English
Weight
1001 KB
Volume
8
Category
Article
ISSN
2251-7235

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Chromium thin film deposition on ITO sub
Chromium thin film deposition on ITO substrate by RF sputtering
✍ Akbarnejad, Elaheh; Soleimani, Ebrahim Asl; Ghorannevis, Zohreh πŸ“‚ Article πŸ“… 2014 πŸ› Springer-Verlag 🌐 English βš– 1001 KB

To obtain a suitable ohmic contact with the lowest resistivity, chromium (Cr) thin films were deposited on transparent conductive oxide indium tin oxide (ITO) by RF sputtering method in argon atmosphere and its electrical properties were optimized. The deposition of Cr thin film has been performed f