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ChemInform Abstract: Room Temperature Silicon Wafer Bonding with Ultra-Thin Polymer Films.

✍ Scribed by G. KRAEUTER; A. SCHUMACHER; U. GOESELE; T. JAWOREK; G. WEGNER

Publisher: John Wiley and Sons
Year: 2010
Weight: 26 KB
Volume: 28
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.199724274

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Room temperature silicon wafer bonding w

Room temperature silicon wafer bonding with ultra-thin polymer films

✍ Dr. Gertrud Kräuter; Andreas Schumacher; Ulrich Gösele; Thomas Jaworek; Prof. Ge 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 334 KB 👁 1 views