ChemInform Abstract: Metal—Organic CVD of Tantalum Oxide from tert-Butylimidotris(diethylamido)tantalum and Oxygen.

✍ Scribed by Hsin-Tien Chiu; Chun-Nan Wang; Shiow-Huey Chuang

• Publisher: John Wiley and Sons
• Year: 2001
• Weight: 34 KB
• Volume: 32
• Category: Article
• ISSN: 0931-7597
• DOI: 10.1002/chin.200105252