Metal–Organic CVD of Tantalum Oxide from tert-Butylimidotris(diethylamido)tantalum and Oxygen

✍ Scribed by H.-T. Chiu; C.-N. Wang; S.-H. Chuang

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 443 KB
• Volume: 6
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(200010)6:5<223::aid-cvde223>3.0.co;2-h