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ChemInform Abstract: Magnetron Sputtering - Milestones of 30 Years

✍ Scribed by G. Braeuer; B. Szyszka; M. Vergoehl; R. Bandorf

Publisher: John Wiley and Sons
Year: 2011
Weight: 18 KB
Volume: 42
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.201110229

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