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ChemInform Abstract: La1-xMnO3-δ Thin Films Grown by a New Liquid Source CVD Process.

✍ Scribed by S. PIGNARD; H. VINCENT; J. P. SENATEUR; J. PIERRE

Publisher
John Wiley and Sons
Year
2010
Weight
35 KB
Volume
29
Category
Article
ISSN
0931-7597

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✍ Graeme A. Horley; Mike R. Lazell; Paul O'Brien 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 33 KB 👁 1 views

Deposition of Thin Films of Gallium Sulfide from a Novel Liquid Single-Source Precursor, Ga(SOCNEt 2 ) 3 , by Aerosol-Assisted CVD. -The novel liquid gallium monothiocarbamato complex (III) is utilized as a single-source precursor for the deposition of face-centered cubic GaS films on glass substra