𝔖 Bobbio Scriptorium
✦   LIBER   ✦

ChemInform Abstract: Hydrogen Chloride Effects on the CVD of Silicon Carbide from Methyltrichlorosilane.

✍ Scribed by George D. Papasouliotis; Stratis V. Sotirchos

Publisher
John Wiley and Sons
Year
2010
Weight
28 KB
Volume
30
Category
Article
ISSN
0931-7597

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Hydrogen Chloride Effects on the CVD of
Hydrogen Chloride Effects on the CVD of Silicon Carbide from Methyltrichlorosilane
✍ George D. Papasouliotis; Stratis V. Sotirchos πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 645 KB

A comprehensive experimental investigation of the effects of hydrogen chloride concentration on the deposition rate and stoichiometry of SiC films produced through thermal decomposition of methyltrichlorosilane (MTS, CH 3 SiCl 3 ) is carried out in a gravimetric hot wall reactor of tubular geometry.

On Chemical Kinetics of Silicon Depositi
On Chemical Kinetics of Silicon Deposition from Silane (V) The Effect of Hydrogen Formation
✍ Dr. sc. H. KΓΌhne πŸ“‚ Article πŸ“… 1991 πŸ› John Wiley and Sons 🌐 English βš– 414 KB

In consequence of hydrogen formation during silane pyrolysis total gas volume increases, when the reaction proceeds at constant total pressure. Any mole of silane decomposed produces two moles of hydrogen. In the present paper expressions are derived for 1' ' and 0.5Ih reaction order describing axia