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ChemInform Abstract: Fluorine Implantation of Atomic Layer Epitaxy Grown In2O3 Films.

✍ Scribed by T. ASIKAINEN; M. RITALA; W.-M. LI; R. LAPPALAINEN; M. LESKELAE

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ChemInform Abstract: Atomic Layer Epitax

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ChemInform Abstract: Atomic Layer Deposi

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