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ChemInform Abstract: Deposition of Copper Films on Silicon from Cupric Sulfate and Hydrofluoric Acid.

✍ Scribed by M. K. LEE; J. J. WANG; H. D. WANG

Publisher: John Wiley and Sons
Year: 2010
Weight: 29 KB
Volume: 28
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.199740305

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