ChemInform Abstract: Buried Cobalt Silicide Layers in Silicon Created by Wafer Bonding.

✍ Scribed by K. LJUNGBERG; A. SOEDERBAERG; A.-L. TIENSUU; S. JOHANSSON; G. THUNGSTROEM; C. S. PETERSSON

• Book ID: 112020974
• Publisher: John Wiley and Sons
• Year: 2010
• Weight: 32 KB
• Volume: 26
• Category: Article
• ISSN: 0931-7597
• DOI: 10.1002/chin.199504281