✦ LIBER ✦
ChemInform Abstract: Analysis of Bonding-Related Gas Enclosure in Micromachined Cavities Sealed by Silicon Wafer Bonding.
✍ Scribed by S. MACK; H. BAUMANN; U. GOESELE; H. WERNER; R. SCHLOEGL
- Publisher
- John Wiley and Sons
- Year
- 2010
- Weight
- 26 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0931-7597
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