Laser-excited fluorescence detection of HSiCl was used to measure the room-temperature kinetics of the reactions of HSiCl with SiH, and Sic&HZ. An upper bound was also obtained for the HSiCl+Hz rate coefficient. Rate coefftcients for insertion of HSiCl into SiH., and SiC12H2 are 3-4 orders of magnit
Chemiionization and chemiluminescence in the reaction of SiH4 with active nitrogen
โ Scribed by O. Horie; P. Potzinger; B. Reimann
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 551 KB
- Volume
- 129
- Category
- Article
- ISSN
- 0009-2614
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โฆ Synopsis
The reaction of SiH4 with active nitrogen in a discharge-flow system was found to produce strong chemiionization besides the well-known SiN* and Si* chemiluminescences. In the presence of a large initial excess of N atoms, both N and SiH4 disappeared completely in the course of the reaction. Addition of as little 02 as 10" cms3 was sufficient to quench the chemiluminescence and suppress chemiionization completely. A mechanism explaining the experimental findings has to include a slow initiation step followed by a branched chain.
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