𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Chemically modified polystyrene containing pendant vinyl groups: a photosensitive polymer exhibiting chemical amplification

✍ Scribed by M.Jean Farrall; Michele Alexis; Mark Trecarten


Book ID
103348031
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
261 KB
Volume
24
Category
Article
ISSN
0032-3861

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Relationship between electron sensitivit
✍ Kiyoshi Oguchi; Kohei Sanui; Naoya Ogata; Yoichi Takahashi; Tomihiro Nakada 📂 Article 📅 1990 🏛 Society for Plastic Engineers 🌐 English ⚖ 365 KB

## Abstract Vinyl polymers containing pendant acetal groups were synthesized using (2,2‐dimethyl‐l,3‐dioxolan‐4‐yl)methyl acrylate (DMA) and (2,2‐dimethyl‐l,3‐dioxo‐lan‐4‐yl)methyl methacrylate (DMM), and were evaluated as negative electron beam (EB) resists. It was found that the EB sensitivity of