Chemically-formed buffer layers for growth of cubic silicon carbide on silicon single crystals

✍ Scribed by Arrigo Addamiano; Philipp H. Klein

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 328 KB
• Volume: 70
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(84)90276-8