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Chemical vapour deposition and atomic layer deposition of amorphous and nanocrystalline metallic coatings: Towards deposition of multimetallic films

✍ Scribed by Elisabeth Blanquet; Arnaud Mantoux; Michel Pons; Constantin Vahlas


Book ID
116606588
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
152 KB
Volume
504
Category
Article
ISSN
0925-8388

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