Chemical Vapor Deposition. Principles and Applications. Herausgegeben von M. L. Hitchman und K. F. Jensen. Academic Press, London, 1993. 677 S., geb. 75.00 £. - ISBN 0-12-349670-5

✍ Scribed by Roland A. Fischer

• Publisher: John Wiley and Sons
• Year: 1994
• Tongue: English
• Weight: 312 KB
• Volume: 106
• Category: Article
• ISSN: 0044-8249
• DOI: 10.1002/ange.19941060932