Chemical vapor deposition of ZrxTi1−xO2 and HfxTi1−xO2 thin films using the composite anhydrous nitrate precursors

✍ Scribed by Qi Yue Shao; Ai Dong Li; Yan Dong; Feng Fang; Jian Qing Jiang; Zhi Guo Liu

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 440 KB
• Volume: 254
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.08.025