Chemical Vapor Deposition of Silicon Dioxide by Direct-Current Corona Discharges in Dry Air Containing Octamethylcyclotetrasiloxane Vapor: Measurement of the Deposition Rate

✍ Scribed by Junhong Chen; Jane H. Davidson

• Book ID: 111603256
• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 378 KB
• Volume: 24
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1023/b:pcpp.0000013197.77036.f5