A Global Model of Chemical Vapor Deposition of Silicon Dioxide by Direct-Current Corona Discharges in Dry Air Containing Octamethylcyclotetrasiloxane Vapor

✍ Scribed by Junhong Chen; Jane H. Davidson

• Book ID: 106490804
• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 420 KB
• Volume: 24
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1007/s11090-004-7930-x