✦ LIBER ✦

Chemical vapor deposition of refractory metals from fluoride gases

✍ Scribed by Yu. V. Lakhotkin; V. P. Kuz’min; T. I. Rybkina; A. B. Kovalev

Book ID: 110666757
Publisher: SP MAIK Nauka/Interperiodica
Year: 2000
Tongue: English
Weight: 366 KB
Volume: 36
Category: Article
ISSN: 0020-1685
DOI: 10.1007/bf02758046

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