Chemical vapor deposition for microelectronics: Principles, Technology, and Applications Author: Arthur Sherman Publishers: Noyes Publications, Publicity Department, Mill Road at Grand Avenue, Park Ridge, New Jersey 07656, United States of America. Price: $ 48.00. ISBN 0-8155-1136-1. Published 1987

✍ Scribed by G.W.A.D.

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 45 KB
• Volume: 28
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(88)90017-0