Chemical roles of peroxide-based alkaline slurries in chemical–mechanical polishing of Ta: investigation of surface reactions using time-resolved impedance spectroscopy

✍ Scribed by K.A Assiongbon; S.B Emery; C.M Pettit; S.V Babu; D Roy

• Book ID: 113780818
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 300 KB
• Volume: 86
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/j.matchemphys.2004.03.016