Chemical effects in chemical mechanical planarization of TaN: investigation of surface reactions in a peroxide-based alkaline slurry using Fourier transform impedance spectroscopy

✍ Scribed by V.R.K. Gorantla; S.B. Emery; S. Pandija; S.V. Babu; D. Roy

• Book ID: 113788647
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 123 KB
• Volume: 59
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/j.matlet.2004.11.010