Chemical and physical sputtering of aluminium and gold samples using Ar–H2 DC-glow discharges

✍ Scribed by C.V. Budtz-Jørgensen; P. Kringhøj; J.F. Nielsen; J. Bøttiger

• Book ID: 108422834
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 361 KB
• Volume: 135
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(00)01085-9