Chemical and Complementary Role of Fluorine in a Chlorine-Based Reactive Ion Etching of GaN

✍ Scribed by Karouta, F. ;Jacobs, B. ;Schoen, O. ;Heuken, M.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 127 KB
• Volume: 176
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199911)176:1<755::aid-pssa755>3.0.co;2-2