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Charging potential of dielectrics and insulated conductors as a function of the angle of incidence of an electron beam

✍ Scribed by Evstaf’eva, E. N.; Zaitsev, S. V.; Rau, E. I.; Tatarintsev, A. A.

Book ID
125406979
Publisher
Allerton Press, Inc.
Year
2014
Tongue
English
Weight
210 KB
Volume
69
Category
Article
ISSN
0027-1349

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## Abstract Energetic beams of electrons and ions are widely used to probe the microscopic properties of materials. Irradiation with charged beams in scanning electron microscopes (SEM) and focused ion beam (FIB) systems may result in the trapping of charge at irradiation induced or pre‐existing de