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Charged particle activation analysis of boron and carbon on the surface of silicon wafer

โœ Scribed by S. Kataoka; Y. Tarumi; H. Yagi; S. Tomiyoshi; T. Nozaki

Book ID
105441836
Publisher
Springer
Year
1997
Tongue
English
Weight
235 KB
Volume
216
Category
Article
ISSN
1588-2780

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## Abstract Charged particle activation analysis is used for the determination of boron, carbon and nitrogen in zircaloy. Carbon can be determined instrumentally using the ^12^C (d,n) ^13^N reaction. For the determination of boron and nitrogen the ^10^B (d, n) ^11^C and the ^14^N (ฮฑ, ฮฑn) ^13^N reac