Charge trapping effect at the contact between a high-work-function metal and Ta2O5 high-k dielectric

✍ Scribed by Novkovski, N; Skeparovski, A; Atanassova, E

• Book ID: 111937930
• Publisher: Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 161 KB
• Volume: 41
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/41/10/105302