High-resolution X-ray diffraction (HR-XRD) with rocking curve, atomic force microscopy (AFM) and photoluminescence (PL) spectroscopy have been performed on highquality quaternary Al x In y Ga 1 À x À y N thin films at room temperature. The Al x In y Ga 1 À x À y N films were grown on c-plane (0 0 0
✦ LIBER ✦
Characterizations of InxAlyGa1−x−yN alloy systems grown on GaN substrates by molecular-beam epitaxy
✍ Scribed by S. Iwata; S. Kubo; M. Konishi; T. Saimei; S. Kurai; T. Taguchi; K. Kainosho; A. Yokohata
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 193 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1369-8001
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