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Characterization of WNx metallization prepared by ion implantation of nitrogen

✍ Scribed by D Gregušová; T Lalinský; Ž Mozolová; D Machajdik; I Pochaba; I Vavra; M Porges

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
707 KB
Volume
249
Category
Article
ISSN
0040-6090

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