Characterization of ultrathin gate dielectrics by grazing X-ray reflectance and VUV spectroscopic ellipsometry on the same instrument

✍ Scribed by Pierre Boher; Patrick Evrard; Jean Philippe Piel; Jean Louis Stehle

• Book ID: 117145743
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 527 KB
• Volume: 303
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(02)00980-8