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Characterization of titanium polycide films by atomic force microscope

✍ Scribed by B. Umapathi; S. K. Lahiri; S. Kal

Book ID: 110270890
Publisher: Springer US
Year: 1999
Tongue: English
Weight: 120 KB
Volume: 10
Category: Article
ISSN: 0957-4522
DOI: 10.1023/a:1008951813066

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