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Characterization of thermally diffused and ion-implanted semicrystalline silicon solar cells

✍ Scribed by M. Finetti; P. Ostoja; S. Solmi; Q. Zini


Publisher
Elsevier Science
Year
1980
Weight
360 KB
Volume
2
Category
Article
ISSN
0379-6787

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PolycrystaUine silicon (Wacker-SILSO) solar cells have been made by phosphorus implantation in combination with pulsed excimer laser annealing or thermal annealing. It was found that laser annealing yields cells with a short-circuit current which is 3% -4% higher than that obtained by thermal anneal