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Characterization of Sputtered AIN Films by Photoelectron Spectroscopy

✍ Scribed by Gräfe, V. ;Reinhardt, H. ;Schalch, D. ;Scharmann, A.

Publisher
John Wiley and Sons
Year
1993
Tongue
English
Weight
329 KB
Volume
136
Category
Article
ISSN
0031-8965

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## Aluminium nitride is of interest for potential use in various microelectronic and optoelectronic applications. C-axis oriented aluminium nitride (AINI thin films on (100) silicon were prepared by DC balanced and/or unbalanced magnetron reactive sputtering from an Al target under different depos