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Characterization of SiGe HBT-structures by double-and triple-crystal diffractometry

✍ Scribed by P. Zaumseil

Book ID
105702785
Publisher
Italian Physical Society
Year
1997
Tongue
English
Weight
378 KB
Volume
19
Category
Article
ISSN
0392-6737

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## Abstract Analytical expressions for coherent and diffuse scattering intensities with account for imperfections in all the crystals of double‐ and triple‐crystal diffractometers (DCD and TCD) have been derived from the generalized dynamical theory of X‐ray scattering in real single crystals which