Characterization of Ni/Ho and Ni/Er fully silicided metal gates on SiO2 gate dielectric

✍ Scribed by Bao-Min Wang; Guo-Ping Ru; Yu-Long Jiang; Xin-Ping Qu; Bing-Zong Li; Ran Liu

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 236 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.04.025