✦ LIBER ✦

Characterization of NbCxN1-xfilms reactively sputtered in (Ar, N2, C2H4) mixtures

✍ Scribed by Tonouchi, M.; Kobayashi, T.; Nakato, Y.; Tsubomura, H.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

IR characterization of a-C:H:N films spu

✍ Gabriel Lazar; Iuliana Lazar 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 315 KB

Reactive sputtering characteristics of s

✍ A. Okamoto; T. Serikawa 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 457 KB

Characterization of tantalum nitride fil

✍ Wen-Horng Lee; Jing-Cheng Lin; Chiapyng Lee 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 325 KB

Reactions of Ar2+(3P) with CH4,C2H2 and

✍ H. Störi; E. Alge; H. Villinger; F. Egger; W. Lindinger 📂 Article 📅 1979 🏛 Elsevier Science ⚖ 543 KB

Diamond-like carbon coatings with nanoco

✍ Khrushchov, M. M.; Atamanov, M. V.; Marchenko, E. A.; Levin, I. S.; Dubravina, A 📂 Article 📅 2014 🏛 Allerton Press, Inc. 🌐 English ⚖ 513 KB

Plasma chemical reactions in C2H2/N2, C2

✍ H.C. Thejaswini; Abhijit Majumdar; Tin Maung Tun; Rainer Hippler 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 440 KB