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Characterization of Mo/B4C multilayers

โœ Scribed by A.F. Jankowski; P.L. Perry


Book ID
103427621
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
452 KB
Volume
206
Category
Article
ISSN
0040-6090

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Thermally induced decomposition of B4C b
โœ S. Bruijn; R.W.E. van de Kruijs; A.E. Yakshin; E. Zoethout; F. Bijkerk ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 515 KB

We investigate the influence of the Mo crystalline state (quasi-amorphous or crystalline) on the thermal stability of Mo/Si thin film multilayers with B 4 C diffusion barrier layers at either of the two interfaces. We find that multilayers containing amorphous Mo layers are more stable than those co