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Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering

✍ Scribed by Gelali, Ali; Ahmadpourian, Azin; Bavadi, Reza; Hantehzadeh, M. R.; Ahmadpourian, Arman

Book ID: 115452568
Publisher: Springer
Year: 2012
Tongue: English
Weight: 723 KB
Volume: 31
Category: Article
ISSN: 0164-0313
DOI: 10.1007/s10894-012-9510-z

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