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Characterization of lutetium oxide-based thin-film capacitors by impedance spectroscopy

✍ Scribed by Tadeusz Wiktorczyk

Book ID
116672016
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
568 KB
Volume
356
Category
Article
ISSN
0022-3093

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Thin film capacitors with BaTiO 3 as dielectric and RuO 2 as electrode material have been prepared by rf-magnetron sputtering at temperatures up to 750 1C and under various oxygen partial pressures. They have been analyzed by complex impedance spectroscopy in the temperature range 20-200 1C. At abou