## Abstract Silicon nanowires (SiNWs) and nanopillars have been obtained by metalβassisted etching (MAE), starting from silver thin films deposited by thermal evaporation and sputtering on silicon substrates. Different deposition methods and thickness are strongly affecting spatial distribution and
Characterization of light emitting silicon nanopillars produced by lithography and etching
β Scribed by S. Grigoropoulos; A.G. Nassiopoulos; A. Travlos; D. Papadimitriou; S. Kennou; S. Ladas
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 926 KB
- Volume
- 102
- Category
- Article
- ISSN
- 0169-4332
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