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Characterization of LaF3 coatings prepared at different temperatures and rates

✍ Scribed by Hua Yu; Yanming Shen; Yun Cui; Hongji Qi; JianDa Shao; ZhengXiu Fan

Book ID
108060342
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
470 KB
Volume
254
Category
Article
ISSN
0169-4332

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## Abstract Zirconium nitride (ZrN) coatings were prepared on Si (100) by single ion beam sputtering in N~2~ and Ar mixture at different substrate temperatures. Structure and morphology of the ZrN coatings were analyzed using X‐ray diffraction and atomic force microscopy. Rutherford backscattering