Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy

✍ Scribed by Mikio Muraoka; Shinji Komatsu

• Book ID: 107470887
• Publisher: Springer-Verlag
• Year: 2010
• Tongue: English
• Weight: 360 KB
• Volume: 6
• Category: Article
• ISSN: 1931-7573
• DOI: 10.1007/s11671-010-9778-8