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Characterization of embedded phase shift masks by reflectance-transmittance measurement

โœ Scribed by Zheng Cui; Philip D. Prewett


Book ID
103599545
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
284 KB
Volume
30
Category
Article
ISSN
0167-9317

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In the quasibinary system \(\mathrm{MnIn}_{2} \mathrm{~S}_{4}-\mathrm{MnIn}_{2} \mathrm{Se}_{4}\) a series of solid solutions of general formula \(\mathrm{MnIn}_{2} \mathrm{~S}_{x} \mathrm{Se}_{4-x}\) exists for \(2.4 \geq x \geq 0.2\) with the layered \(\mathrm{MgAl}_{2} \mathrm{~S}_{4}\) structure