Metal multi-user MEMS processes (MetalMUMPs) offered by MEMSCAP provide a 20 m thick electroplated nickel film suitable for constructing micro RF tunable capacitors, RF inductors, relays, switches, etc. Currently the Young's modulus and the residual stress gradient of the MetalMUMPs nickel film have
Characterization of electroplated nickel
โ Scribed by T. Fritz; H. S. Cho; K. J. Hemker; W. Mokwa; U. Schnakenberg
- Publisher
- Springer-Verlag
- Year
- 2002
- Tongue
- English
- Weight
- 135 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0946-7076
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## Abstract Permalloy (Ni~81~Fe~19~) films and foils were fabricated by means of electroplating. Two different types of samples were produced, (i) a patterned permalloy film on a Si wafer (type 1) and (ii) a NiFe foil (type 2), which was separated from the substrate after deposition. The samples we