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Characterization of electrodeposited nickel film surfaces using atomic force microscopy

✍ Scribed by M. Saitou; W. Oshikawa; A. Makabe

Book ID: 108356674
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 142 KB
Volume: 63
Category: Article
ISSN: 0022-3697
DOI: 10.1016/s0022-3697(01)00254-2

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## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50 nm can be characterized directly without t