Characterization of bias sputtered metallization for IC technology : N. McIntyre and S. J. Wright. Vacuum34 (10/11), 963 (1984)

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 131 KB
• Volume: 25
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(85)90294-x