Characterization of arsenphosphosilicate glass films for VLSI applications—Part II. Step coverage and planarization

✍ Scribed by L. Zambov; Y. Yanakiev; I. Nedev; M. Anastassova

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 909 KB
• Volume: 34
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(91)90063-5